PPS for CMP applications

TECATRON CMP offers users excellent thermal and chemical resistance, along with low levels of ionic impurities. This unique combination makes the material an excellent choice for applications that require low outgassing, and high purity. PPS is typically used in the electrical/ electronic and semiconductor industries. Low abrasion and excellent sliding and wear properties, combined with high purity give TECATRON CMP an outstanding property profile for applications where tight tolerances and long service life are needed.


Chemical Designation:
PPS (Polyphenylensulfide)
# beige
1,34 g/cm3

Main Features:

  • good heat deflection temperature
  • good chemical resistance
  • resistance against high energy radiation
  • high strength
  • high dimensional stability
  • high stiffness
  • high creep resistance

Target Industries:

semiconductor technology

Technical Details

Stock program