PEEK for CMP applications

TECAPEEK CMP is a Victrex® PEEK polymer specially modified for applications in the semiconductor industry, and more specfically for parts in CMP (chemical mechanical planarization) equipment. The material maintains the outstanding property profile inherant to PEEK, which includes high mechanical strength and dimensional stability for tightest part tolerances, along with a low tendency to creep. TECAPEEK CMP is of a higher purity level than standard TECAPEEK. This combined with excellent chemical resistance and specially improved abrasion and friction characteristics, rounds out the property profile of this PEEK CMP modification.


Chemical designation
PEEK (Polyetheretherketone)
# natural
1,31 g/cm3

Main Features

  • good heat deflection temperature
  • good machinability
  • inherent flame retardant
  • hydrolysis and superheated steam resistant
  • high toughness
  • resistance against high energy radiation
  • good slide and wear properties
  • high creep resistance

Target industries

semiconductor technology

Technical details

Stock program