TECAPEEK CMP natural

PEEK for CMP applications

TECAPEEK CMP is a Victrex® PEEK polymer specially modified for applications in the semiconductor industry, and more specfically for parts in CMP (chemical mechanical planarization) equipment. The material maintains the outstanding property profile inherant to PEEK, which includes high mechanical strength and dimensional stability for tightest part tolerances, along with a low tendency to creep. TECAPEEK CMP is of a higher purity level than standard TECAPEEK. This combined with excellent chemical resistance and specially improved abrasion and friction characteristics, rounds out the property profile of this PEEK CMP modification.

Facts

Chemical designation

PEEK (Polyetheretherketone)

Colour

beige

Density

1,31 g/cm3

Main Features

good heat deflection temperature
good machinability
inherent flame retardant
hydrolysis and superheated steam resistant
high toughness
resistance against high energy radiation
good slide and wear properties
high creep resistance

Target industries

semiconductor technology

Downloads

Datasheet (PDF)

Product handling (PDF)

Technical details

Mechanical properties

Mechanical properties
Mechanical properties	Value	Unit	Parameter	Norm
Compression strength	34	MPa	1% / 2%	EN ISO 604
Modulus of elasticity (flexural test)	3900	MPa	2mm/min, 10 N	DIN EN ISO 178
Flexural strength	160	MPa	2mm/min, 10 N	DIN EN ISO 178
Elongation at break (tensile test)	50	%	50mm/min	DIN EN ISO 527-2
Tensile strength at yield	110	MPa	50mm/min	DIN EN ISO 527-2
Elongation at yield	4	%	50mm/min	DIN EN ISO 527-2
Modulus of elasticity (tensile test)	4100	MPa	1mm/min	DIN EN ISO 527-2
Tensile strength	110	MPa	50mm/min	DIN EN ISO 527-2
Ball indentation hardness	240	MPa		ISO 2039-1
Impact strength (Charpy)	n.b.	kJ/m2	max. 7,5J	DIN EN ISO 179-1eU
Compression modulus	3200	MPa	5mm/min, 10 N	EN ISO 604
Notched impact strength (Izod)	4	kJ/m2		DIN EN ISO 179-1eA

Thermal properties

Thermal properties
Thermal properties	Value	Unit	Parameter	Norm
Thermal expansion (CLTE)	6	10-5*1/K	23-100°C, long.	DIN EN ISO 11359-1;2
Thermal expansion (CLTE)	5	10-5*1/K	23-60°C, long.	DIN EN ISO 11359-1;2
Service temperature	260	C	long term	NN
Heat distortion temperature	162	C	HDT, Method A	ISO-R 75 Method A
Service temperature	300	C	short term	NN
Melting temperature	340	C		DIN EN ISO 11357
Glass transition temperature	151	C		DIN EN ISO 11357
Thermal conductivity	0.27	W/(k*m)		ISO 22007-4:2008
Specific heat	1.1	J/(g*K)		ISO 22007-4:2008
Thermal expansion (CLTE)	7	10-5*1/K	100-150°C, long.	DIN EN ISO 11359-1;2

Electrical properties

Electrical properties
Electrical properties	Value	Unit	Parameter	Norm
surface resistivity	10¹⁵	O	Silver electrode, 23°C, 12% r.h.	DIN IEC 60093
volume resistivity	10¹⁵	O*cm	Silver electrode, 23°C, 12% r.h.	DIN IEC 60093
Dielectric strength	73	kV/mm	23°C, 50% r.h.	ISO 60243-1
Resistance to tracking (CTI)	125	V	Platin electrode, 23°C, 50% r.h., solvent A	DIN EN 60112

Other properties
Other properties
Other properties Value Unit Parameter Norm
Resistance to hot water/ bases + - -
Resistance to weathering - - -
Water absorption 0.03 % 24h / 96h (23°C) DIN EN ISO 62

Other properties	Value	Unit	Parameter	Norm
Resistance to hot water/ bases	+	-		-
Resistance to weathering	-	-		-
Water absorption	0.03	%	24h / 96h (23°C)	DIN EN ISO 62