TECAPEEK CMP natural
PEEK for CMP applications
TECAPEEK CMP is a Victrex® PEEK polymer specially modified for applications in the semiconductor industry, and more specfically for parts in CMP (chemical mechanical planarization) equipment. The material maintains the outstanding property profile inherant to PEEK, which includes high mechanical strength and dimensional stability for tightest part tolerances, along with a low tendency to creep. TECAPEEK CMP is of a higher purity level than standard TECAPEEK. This combined with excellent chemical resistance and specially improved abrasion and friction characteristics, rounds out the property profile of this PEEK CMP modification.