TECATRON CMP natural is an unfilled PPS plastic (polyphenylene sulfide) optimized specifically for CMP retaining ring applications and is thus part of Ensinger's portfolio for the semiconductor industry. TECATRON CMP natural is characterised by a unique property profile that enables reduced micro scratches and wafer level defects than standard PPS polymer, when used as CMP retaining rings. The former name of TECATRON CMP natural has been TECATRON SE natural. 

A key challenge in material selection is that minor differences in the material properties of the CMP retaining ring will impact the shape of the pad asperities. This modification will cause different amounts of pad fragments and influence the extent of fragment entrainment, which in turn has a significant impact on the overall performance of the CMP process. Studies have shown that TECATRON CMP wears the pads in a manner so that the pad asperities are optimized for enhanced material removal as well as reduced defects. (See study, the product is called TECATRON SE in the article, which is the former name of TECATRON CMP) 

As with all Ensinger semiconductor grades, TECATRON CMP natural tubes are processed in compliance with semiconductor copy exactly requirements (also known as copy exact or CE) and more stringent quality controls compared to industrial PPS grades.
Additional quality controls and measures enable reduced risks of impurities and improved internal stress and dimensional stability compared to standard industrial PPS materials.

Besides the optimizations of material properties, Ensinger has also developed special tube sizes that better fit typical sizes of CMP retaining rings, thus enables reduction of waste and costs during machining. For example, using the tube size with O.D. 350 mm / I.D 300 mm saves up to 27 % material costs compared to conventional O.D. 360 / I.D. 290 mm.

For CMP retaining rings that require more enhanced lifetime, Ensinger offers an unfilled PEEK based TECAPEEK CMP natural, also with a special property profile aligned to CMP retaining rings. For other semiconductor PPS applications that do not require this special property profile, Ensinger offers a more cost-efficient semiconductor grade PPS plate, rod, and tubes – TECATRON SX natural.




Chemical designation
PPS (Polyphenylensulfide)
1.36 g/cm3

Main Features

  • good heat deflection temperature
  • good chemical resistance
  • resistance against high energy radiation
  • high strength
  • high dimensional stability
  • high stiffness
  • high creep resistance

Target industries

Technical details

  • product-technical-detail-collapse-item-0-lvl-1
    Mechanical properties Value Unit Parameter Norm
    Modulus of elasticity
    (tensile test)
    4100 MPa 1mm/min DIN EN ISO 527-2
    Tensile strength 102 MPa 50mm/min DIN EN ISO 527-2
    Tensile strength at yield 100 MPa 50mm/min DIN EN ISO 527-2
    Elongation at yield (tensile test) 4 % 50mm/min DIN EN ISO 527-2
    Elongation at break (tensile test) 4 % 50mm/min DIN EN ISO 527-2
    Flexural strength 151 MPa 2mm/min, 10 N DIN EN ISO 178
    Modulus of elasticity
    (flexural test)
    4000 MPa 2mm/min, 10 N DIN EN ISO 178
    Compression modulus 3300 MPa 5mm/min, 10 N EN ISO 604
    Compression strength 20/38/96 MPa 1% / 2% / 5% EN ISO 604
    Impact strength (Charpy) 29 kJ/m2 max. 7,5J DIN EN ISO 179-1eU
    Shore hardness 87 D DIN EN ISO 868
  • product-technical-detail-collapse-item-1-lvl-1
    Thermal properties Value Unit Parameter Norm
    Glass transition temperature 97 C DIN EN ISO 11357
    Melting temperature 281 C DIN EN ISO 11357
    Thermal conductivity 0.25 W/(k*m) ISO 22007-4:2008
    Specific heat 1.0 J/(g*K) ISO 22007-4:2008
    Service temperature 260 C short term NN
    Service temperature 230 C long term -
    Thermal expansion (CLTE) 6 10-5*1/K 23-60°C, long. DIN EN ISO 11359-1;2
    Thermal expansion (CLTE) 7 10-5*1/K 23-100°C, long. DIN EN ISO 11359-1;2
    Thermal expansion (CLTE) 12 10-5*1/K 100-150°C, long. DIN EN ISO 11359-1;2
  • product-technical-detail-collapse-item-2-lvl-1
    Electrical properties Value Unit Parameter Norm
    surface resistivity 1014 DIN IEC 60093
    volume resistivity 1014 Ω*cm DIN IEC 60093
  • product-technical-detail-collapse-item-3-lvl-1
    Other properties Value Unit Parameter Norm
    Resistance to hot water/ bases + - -
    Flammability (UL94) V0 - corresponding to DIN IEC 60695-11-10;
    Resistance to weathering - - -
    Water absorption <0.01 - 0.01 % 24h / 96h (23°C) DIN EN ISO 62
  • product-technical-detail-collapse-item-4-lvl-1
    Relative costs Value Unit Parameter Norm
    Relative costs EU from € to €€€€€€ €€€

Stock program